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Analysis Instruments

主な分析装置

Each plant of Sanyo Vacuum is provided with measuring equipment for the control of film specifications according to one charge cycle within the set of production processes. In addition, the most reliable production system has been established to ensure upgraded quality while having periodical meetings with our customers. Consequently, we have gained high satisfaction from our customers.

Main Analysis Instruments

測定・分析装置測定・分析装置測定・分析装置
Name of Instruments Use
Resistivity Meter The surface resistivity and the resistivity ratio of film are measured with the four-point probe method.
Surface Roughness Meter Film thickness is measured with a surface roughness meter by running a sensing pin over the stepped portion of films.
Spectrophotometer The transmission rate or reflectance ratio is measured.
Scanning Electron Microscope The appearance profile of the film surface and section is observed.
Atomic Force Microscope The appearance profile of the film surface is measured in nanometer order.
Halogen Lamp Defective factors such as scratches, unevenness pinholes, and foreign materials are detected as an appearance profile.
X-ray Diffractometer Crystallization, orientation, of film a analyzed.

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